MEMS/NEMS Sensors: Fabrication and Application
Goutam Koley$54.32
$63.90
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.
Binding Type: Paperback
Publisher: Mdpi AG
Published: 11/20/2019
ISBN: 9783039216345
Pages: 242
Weight: 1.16lbs
Size: 9.61h x 6.69w x 0.66d